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Electron Guns / Ion Sputtering Guns



Electron Gun

G10 Series

The miniature electron gun G10 series’ small size gives it flexible mounting configuration abilities along with easy fitting to any system. The electron gun is equipped with a thoriated tungsten filament that has an operating energy range of 5 – 3000 eV. For details, visit the G10 Series Product Page

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Features

  • Miniature lens design
  • Variable beam diameter
  • Variable beam energy
  • Low outgassing rate
  • Flexible mounting configuration

Applications

The miniature size of the Electron Gun G10 series allows it to easily fit to any UHV system. It is a convenient tool for many applications especially LEED and AES experiments.

Specifications, Configuration and More


Ion Sputtering Gun

Model IG35 IONEC

High performance ion sputtering gun with simple design and efficient use of vacuum chamber space.

The IG35 IONEC is a miniature ion sputtering gun designed for sample surface cleaning and depth profiling for auger electron spectroscopy. The IONEC combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing a uniform, high density, inert gas ion beam with a diameter from 5 to 10mm. The entire device is mounted on a mini CF flange. For details, visit the IG35 IONEC Product Page

Features

  • Precision sputtering for sample cleaning and depth profiling
  • Low operating gas pressure: 10-6 – 10-7 Torr
  • 2 long life filaments
  • Variety of operating gases: noble – reactive
  • Mini CF flange mounting
  • Direct gas inlet to ion source

Applications

The IG35 ion gun is designed for sample surface cleaning and depth profiling for auger electron spectroscopy.

Specifications, Configuration and More


Ion Sputtering Gun

Model IG70 IONEC

High performance ion sputtering gun with simple design and efficient use of vacuum chamber space.

The IG70 IONEC is a miniature ion sputtering gun designed for sample surface cleaning and depth profiling for auger electron spectroscopy. The IONEC combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing a uniform, high density, inert gas ion beam with a diameter from 5 to 20mm. For details, visit the IG70 IONEC Product Page

Features

  • Precision sputtering for sample cleaning and depth profiling
  • Low operating gas pressure: 10-6 – 10-7 Torr
  • Wide range of ion beam diameters and sample distances
  • 2 long life filaments
  • Variety of operating gases: noble – reactive
  • Direct gas inlet to ion source

Applications

The IG70 ion gun is designed for sample surface cleaning and depth profiling for auger electron spectroscopy.

Specifications, Configuration and More