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Electron Guns / Ion Sputtering Guns



Electron Gun

EG10-XY Series

Miniature Electron Gun 10 mm Diameter with Dual Lenses and Low Outgassing

Model EG10-XY is a precision low energy electron source emitted from thermionic cathode and formed by double focusing lenses. This model is designed for the wide energy range from 5 eV to 3000 eV with high coherence capability. The applications include electron diffraction, excitation source for Auger electrons and photons, and other surface and atomic physics experiments.

For details, visit the EG10-XY Product Page

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Features

  • Miniature lens design
  • Variable beam diameter
  • Variable beam energy
  • Low outgassing rate
  • Flexible mounting configuration
  • Customization capability

Specifications, Configuration and More


IONEC - Ion Sputtering Gun

Model IG35-DP with Exchangeable Apertures

The IG35-DP Ion gun is designed for sample surface cleaning and depth profiling with Auger electron spectroscopy. Surface treatments with IG35-DP are applicable to a wide range of materials from metals, semiconductors, and oxides, to thin films and 2D layers.

For details, visit the IONEC Model IG35-DP Product Page

Features

  • Precision sputtering for sample cleaning and depth profiling
  • Low operating gas pressure: 10-6 – 10-7 torr
  • Compact and simplified design
  • Two long life filaments
  • Variety of operating gases: Ar, Noble or Reactive

Specifications, Configuration and More


IONEC - Ion Sputter Gun

Model IG70-DP with Exchangeable Apertures

The IG70-DP Ion gun is designed for sample surface cleaning and depth profiling with Auger electron spectroscopy. Surface treatments with IG70-DP are applicable to a wide range of materials from metals, semiconductors, and oxides, to thin films and 2D layers.

For details, visit the IONEC Model IG70-DP Product Page.

Features

  • Precision sputtering for sample cleaning and depth profiling
  • Low operating gas pressure: 10-6 – 10-7 torr
  • Wide range of ion beam diameters and sample distances
  • Two long life filaments
  • Variety of operating gases: Ar, Noble or Reactive

Specifications, Configuration and More


IONEC - Ion Sputtering Gun

Model IG70-XY-DP with Exchangeable Apertures

The IG70-XY-DP Ion gun is designed for sample surface cleaning and depth profiling with Auger electron spectroscopy. Surface treatments with IG70-XY-DP are applicable to a wide range of materials from metals, semiconductors, and oxides, to thin films and 2D layers.

For details, visit the IG70-XY-DP IONEC Product Page.

Features

  • Precision sputtering for sample cleaning and depth profiling
  • X-Y ion beam deflection and rastering
  • Low operating gas pressure: 10-6 – 10-7 torr
  • Wide range of ion beam diameters and sample distances
  • 2 long life filaments
  • Variety of operating gases: noble – reactive

Specifications, Configuration and More