The IONEC Model IG70 will meet your requirements for high performance sputter ion gun while maintaining simplicity in its design and an economy in its use of vacuum chamber space.
The IONEC, a miniature ion sputtering gun, is an instrument designed for cleaning sample surfaces and depth profiling for Auger Electron Spectroscopy. The gun produces a uniform, high density, inert gas ion beam with a beam diameter from 5 to 20mm. The IONEC IG70 combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing the ion beam. The entire device is mounted on a 23/4" CF flange. The gun has a port to admit gas directly into the ionization region and a port to differentially pump the lens region. This will maximize the pressure differential between the main chamber an the ion source.
Ion Gun Model IG70