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UHV System for Li-ion Battery Development
UHV System for Li-ion Liquid Electrolyte & Solid State Li-ion Battery Development & Fabrication
Model V2
Figure 1. V2 UHV system for Li-ion battery development / fabrication.
Figure 2. V2 UHV system for Li-ion battery development / fabrication - labelled.
Figure 3. Li-ion liquid electrolyte and solid state batteries - poster.
Figure 4. Li-ion-liquid-electrolyte battery cell rendering - labelled.
Figure 5. Li-ion solid state battery cell rendering - labelled.
Figure 2. V2 UHV system for Li-ion battery development / fabrication - labelled.
Figure 3. Li-ion liquid electrolyte and solid state batteries - poster.
Figure 4. Li-ion-liquid-electrolyte battery cell rendering - labelled.
Figure 5. Li-ion solid state battery cell rendering - labelled.
UHV system for Li-ion liquid electrolyte & solid state li-ion battery development & fabrication – nano-scale process control with in-situ characterization under ultra-high purity environment.
Processes
- Complete solid-state battery fabrication
- UHV Surface preparation & epitaxial film growth
- Ion bombardment
- Thermal annealing
- Wafer bonding vacuum furnace
- Deposition of Li and metal contacts
- Surface engineering of Li-ion battery electrodes
In-Situ Characterization
- LEED (Low Energy Electron Diffraction)
- AES (Auger Electron Spectroscopy)
- ADP (Auger Depth Profiling)
- Thin Film Thickness Monitor
- Residual & Desorption Gases Analyzer
- Li-ion Battery Analysis
Downloads
Download the UHV System for Li-ion Battery Development & Fabrication Poster (PDF)
