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UHV System for Li-ion Battery Development

UHV System for Li-ion Liquid Electrolyte & Solid State Li-ion Battery Development & Fabrication

Model V2

UHV system for Li-ion liquid electrolyte & solid state li-ion battery development & fabrication – nano-scale process control with in-situ characterization under ultra-high purity environment.

Processes

  • Complete solid-state battery fabrication
  • UHV Surface preparation & epitaxial film growth
  • Ion bombardment
  • Thermal annealing
  • Wafer bonding vacuum furnace
  • Deposition of Li and metal contacts
  • Surface engineering of Li-ion battery electrodes

In-Situ Characterization

  • LEED (Low Energy Electron Diffraction)
  • AES (Auger Electron Spectroscopy)
  • ADP (Auger Depth Profiling)
  • Thin Film Thickness Monitor
  • Residual & Desorption Gases Analyzer
  • Li-ion Battery Analysis