Excellent MBE system for synthesis of nanoscale materials for semiconductors and energy applications with integrated in-situ characterization tools.

Techniques

• LEED ( Low Energy Electron Diffraction)
• AES ( Auger Electron Spectroscopy)
• Ion Argon, Oxygen and Hydrogen Bombardment
• Thin Film Thickness Monitor
• 7 Deposition Sources

Available Ports

• XPS ( X-Ray Photoelectron Spectroscopy)
• RHEED (Reflection High Energy Electron Diffraction)
• TDS ( Thermal desorption Spectroscopy)

Features

• Short switching time between deposition and surface characterization
• Easy sample transfer; simple compatibility to microscopy & further processing
• Optional electrochemical chamber
• Ease of operation

Download Brochure / Poster

Download the Integrated MBE System IMBE300-B Poster/Brochure (PDF)

Techniques

• Low Energy Electron Diffraction (LEED)
• Auger Electron Spectroscopy (AES)
• 7 Deposition Sources
• Liquid Phase Epitaxy (LPE)
• Cyclic Voltammetry
• Surface Preparation with Thermal Annealing and Ion Bombardment

Options

• X-Ray Photoelectron Spectroscopy (XPS)
• Reflection High Energy Electron Diffraction (RHEED)
• Thermal Desorption Mass Spectroscopy (TDS)

Features

• No need to transfer to another chamber for analysis after film growth
• Short switching time between deposition and surface science analysis
• Load-lock with transfer arm and sample storage
• Sample transfer compatibility with other systems: SPM and SEM

Download Brochure

Download the IMBE300-LPE-EC System Brochure (PDF)

Epitaxial Growth Process with integrated monitoring, 2-D crystallography, composition and electronics band analysis in one UHV chamber.

Techniques

• LEED (Low Energy Electron Diffraction)
• AES (Auger Electron Spectroscopy)
• 7 Deposition Sources
• XPS (X-Ray Photoelectron Spectroscopy)
• RHEED (Reflection High Energy Electron Diffraction)
• TDS (Thermal Desorption Mass Spectroscopy)

Features

• No need to transfer to another UHV chamber for analysis after film growth
• Short switching time between deposition and surface science analysis
• Load-lock with transfer arm and sample storage
• Sample transfer compatibility with other systems: SPM and SEM

Download Brochure

Download the IMBE300 System Brochure (PDF)

Techniques

• Low Energy Electron Diffraction (LEED)
• Auger Electron Spectroscopy (AES)
• Medium Energy Electron Diffraction (MEED)
• Liquid Phase Expitaxy (LPE)
• 5 Deposition Sources

Features

• Unique configuration for high precision interface synthesis - MBE and surface preparation with high growth rate process - LPE
• Two complementary processes in one integrated UHV system
• Load-lock transfer arm and sample storage
• Sample transfer compatibility with other systems: XPS, SPM, and SEM

Download Brochure

Download the IMBE200-LPE System Brochure (PDF)

Techniques

• Low Energy Electron Diffraction (LEED)
• Auger Electron Spectroscopy (AES)
• Surface Preparation with Thermal Annealing and Ion Bombardment
• Cyclic Voltammetry

Optional

• Thermal Desorption Mass Spectroscopy
• Evaporation Sources

Electrochemical Cell with UHV Attachment

Unique tool for nanoscale monitoring and experimental modelling of electrochemical processes:

• electrodeposition of epitaxial films
• electrochemical etching
• single atom catalysis
• corrosion studies
• epitaxial graphene interactions
• well-defined electrodes for battery, fuel cell and water splitting
• substrate crystallography induced by soft matter interactions (organic and biological molecules)

Download Brochures

• Download the SCA100-EC System Brochure (PDF)
• Download the Electrochemical Cell with UHV Attachment (PDF)

Techniques

• LEED (Low Energy Electron Diffraction)
• AES (Auger Electron Spectroscopy)
• Ion Sputter Sample Cleaning
• Thermal Sample Annealing
• TDS (Thermal Desorption Mass Spectroscopy)
• 7 Deposition Sources

Features

• Continuous LEED structure monitoring during film growth from multiple sources
• Load-lock with transfer arm and sample storage
• Sample transfer compatibility with other systems: XPS, SPM and SEM

Download Brochure

Download the LEED-MBE250 Model Brochure (PDF)

Diagnostics and Troubleshooting of The Film Process

• Purity of Thin Films
• Atomic Composition
• 2-D Crystallography
• Gas Emission and Coating Desorption Characteristics

Techniques

• Auger Electron Spectroscopy (AES)
• Low Energy Electron Diffraction (LEED)
• Ion Beam Cleaning and Depth Profiling
• Thermal Desorption Mass Spectroscopy (Optional)

The single crystal reference sample is transferred to the vacuum deposition system, after the process is complete the coated sample is moved back for analysis. MAS120 module operates independently and will not interfere with the existing deposition process.

Download Brochure

Download the MAS120 Model Brochure (PDF)

Thin Film Elemental Composition at Different Depth

Model LADP800 is the compact instrument to measure elemental surface composition of thin films using Auger electron spectroscopy and Argon ion bombardment to obtain composition v.s depth. In addition, the instrument can integrate gas emission analysis from thin film.

Features

• Customized side UHV attachment to fit most of the vacuum deposition chambers.

Download Brochure

Download the LADP800 Series Brochure (PDF)

• Nano-scale measurements of elemental composition on thin films and alloys
• Analytical system based on LEED and Auger electron spectroscopy and argon ion sputtering for composition and thickness depth profiling of thin films and alloys

Features

• Sub-nanometer precision for atomic structures, composition and thickness
• Analysis of wide range of samples
• Semi-automatic operation

Specifications

For specifications, visit the product page.

Download Brochure

Download the ADP200 Series Brochure (PDF)

Custom Systems, Design & Build

OCI Vacuum Microengineering provides customization to any of their surface analytical components. In the past, many customers have communicated their needs and OCI has responded with either adaptations or developments of new products.

In addition, OCI Vacuum Microengineering also specializes in the design and construction of complete UHV systems based on your custom requirements. The common elements of these systems include precision UHV chambers, a main pump (usually ion pump), an auxiliary pump (usually turbomolecular), a precision sample manipulator, a mounting framework with leveling feet and vacuum gauging.

Optional components typically requested by the customer are a rapid sample introduction system (load lock) and bakeout control.

Please contact us directly for more information about our capabilities to adapt and tailor any design to your specific requirements or to discuss your custom complete system requirements.

Modernized & Upgraded UHV Systems

For example: Previously Used, Refurbished & Upgraded UHV MBE (Molecular Beam Epitaxy) System

Varian, Model VTC-120

• LEED-AES spectrometer, LEED 800 (Model BDL800IR)
• Ion sputtering gun, Model IG70
• Quartz thin film thickness monitor
• Sample stage (X-Y-Z-R) with Omicron type sample plate
• Sample e. beam heating up to 1600C °C and thermocouple
• Sample storage for 6 samples
• Sample load-lock chamber with turbo pump and sample transfer
• Effusion cells or e. beam evaporators with water cooling (Qty. 6)
• Varian ion pumps and TSP pump with LN2 cooling
• System bake-out to 150C °C with cover tent and timers
• Ultimate pressure: less than 2x10exp-11 torr

Other used UHV-MBE systems available for sale with similar configuration

1. Perkin-Elmer with Ultek D-I Ion Pump and TSP
2. UHV-MBE with 12" (300mm) O.D. Spherical Chamber and Varian StarCell Ion Pump
3. Compact UHV-MBE with 6.250" (160mm) O.D. Spherical Chamber and Varian StarCell Ion Pump

Surface Nanoscale Materials Characterization

Ultra-High Vacuum System is a perfect environment for advanced materials characterization, growth and processing.

Applications

The surface and interface processes at the atomic and molecular level are responsible for the performance of the wide range of technologies in microelectronics, computing, energy harvesting, energy storage, catalysis and medical devices.

The manufactured tools offers basic and fundamental properties characterization, experimental modelling and molecular beam epitaxy synthesis on metals, alloys, semiconductors, oxides, etc. In general, any surface crystallographic and compositional impact of chemical reactions at interface of solid state matter with gases, liquids and vacuum can be monitored.

Download Brochure

• Surface Nanoscale Materials Characterization (PDF)

Contact Us

Please contact us to express interest in our UHV systems, custom design, refurbished modernized systems, or if you have questions regarding any additional modifications or customized requirements.