UHV system for Li-ion liquid electrolyte & solid state li-ion battery development & fabrication – nano-scale process control with in-situ characterization under ultra-high purity environment.

Processes

• Complete solid-state battery fabrication
• UHV Surface preparation & epitaxial film growth
• Ion bombardment
• Thermal annealing
• Wafer bonding vacuum furnace
• Deposition of Li and metal contacts
• Surface engineering of Li-ion battery electrodes

In-Situ Characterization

• LEED (Low Energy Electron Diffraction)
• AES (Auger Electron Spectroscopy)
• ADP (Auger Depth Profiling)
• Thin Film Thickness Monitor
• Residual & Desorption Gases Analyzer
• Li-ion Battery Analysis

Lithium Diffusion Tester, Model LDT200 is a complete ultra-high vacuum system to characterize the lithium concentration on the surface of tested material and surface crystallographic changes on single-crystal substrates. It has the capability to measure the Lithium diffusion rate and diffusion activation energy using variable temperature sample stage from cryogenic temperatures to 1000 C. This method is based on creating a concentration gradient of Lithium on the surface by evaporation of Lithium on tested material in an ultra-high vacuum environment and tracing Lithium concentration using Auger electron spectroscopy (AES). The structural effect of lithium deposition and diffusion on the host materials is measured on the surface using Low Energy Electron Diffraction (LEED). The capacity of tested material for Lithium storage can be also measured using this method.

Downloads

Download the UHV System for Li-ion Battery Development & Fabrication Poster (PDF)