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IONEC - Ion Sputtering Gun

Model IG70-XY-DP with Exchangeable Apertures

The IG70-XY-DP Ion gun is designed for sample surface cleaning and depth profiling with Auger electron spectroscopy. Surface treatments with IG70-XY-DP are applicable to a wide range of materials from metals, semiconductors, and oxides, to thin films and 2D layers.


Features

  • Precision sputtering for sample cleaning and depth profiling
  • X-Y ion beam deflection and rastering
  • Low operating gas pressure: 10-6 – 10-7 torr
  • Wide range of ion beam diameters and sample distances
  • 2 long life filaments
  • Variety of operating gases: noble – reactive

Applications

The IG70-XY-DP ion gun is designed for sample surface cleaning and depth profiling for Auger electron spectroscopy.

Drawings

For seamless integration, 3D step files are available for all models.

Schematic - IG70-XY-DP IONEC.

Key Specifications

For key specifications, ordering guide and more information about model IG70-XY-DP, please download the PDF brochure below.

Configuration Guide

The IG70 ion gun is controlled using the IPS3-D power supply.

Brochure

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