OCI Vacuum Microengineering

Model IG70 IONEC
The IONEC- model IG70 will meet your requirements for high performance sputter ion gun while maintaining simplicity in its design and an economy in its use of vacuum chamber space.
The IONEC, a miniature ion sputtering gun, is an instrument designed for cleaning sample surfaces and depth profiling for Auger Electron Spectroscopy. The gun produces a uniform, high density, inert gas ion beam with a beam diameter from 5 to 20 mm. The IONEC IG70 combines an enhanced ion source with an electrostatic lens configuration for accelerating and focusing the ion beam. The entire device is mounted on a 23/4" CF flange. The gun has a port to admit gas directly into the ionization region and a port to differentially pump the lens region. This will maximize the pressure differential between the main chamber an the ion source. Features:
  • enhanced ion source for increased beam intensity
  • 2 3/4" CF flange mounting
  • direct gas inlet to ion source
  • port for differential pumping
  • direct filament mounting on the 23/4" CF flange feedthrough
  • variable beam energy from 0 to 3 keV, digital panel meters, remote control of beam energy and computer programming
Specifications Test Results
Ion Gun (Model IG70)

ION

Beam Energy

Ion Current

Chamber

Gas Pressure

Ion Current

Chamber

Gas Pressure
Ion Source Electron impact ionization in magnetic field

keV

m A

Torr

m A

Torr
Ionization Cathode Tungsten - Rhenium filament mounted directly on2 3/4" CF flange

Ar+

0.1

1.0

5x10-6

0.5

2.5x10-6
Beam Size Adjusted by focus voltage to 5 - 20 mm

0.2

2.0

0.8
Beam Current 16µA at 3 keV energy and 5x10-6 Torr of Ar+

0.5

6.5

1.5
Beam Energy Variable from 0 to 3000 eV

1.0

10

3.5
Mounting 2.75" (70mm) O.D. CF flange

1.5

12

5.5
Bakeability Up to 220°C

2.0

13.0

8.5
Overall Sizes 30mm lens diameter, 130mm distance between mounting flange and filament feedthrough (180 mm including), 100mm width and 70mm depth

2.5

14

12
 

3.0

16

14
Power Supply (model IPS2 and IPS3) Ordering Guide
Outputs Filament current: 0 - 4 A
Grid voltage: +150 V
Beam voltage: 0 - 3 kV
Focus voltage: x 0.3 - 0.8 of beam voltage		 IG70DP Complete ion sputter gun with port for differential pumping
Monitoring Beam Energy, Filament Current and Emission Current by digital panel meters (3 1/2 digit) IPS2 Power supply with voltage range 0 – 2000V
Controls 10 turn potentiometers for Beam Energy and Filament Current, 12 position switch for Focus IPS3 Power supply with voltage range 0 – 3000V
Remote Control
(optional)		 Remote control mini-box for beam voltage RC Remote control mini-box
Computer control 0 to 9 V (Model IPS2)
0 to 5.4 V (Model IPS3)		 F007 Replacement filament
Protection Short circuit and arc protection, self restoring F007-FL Replacement filament on 23/4"CFF 6-pin feedthrough
Input 115 VAC, 60 Hz - standard
International range: 100/120/220/230/240 VAC, 47 - 440 Hz		 Outline Drawing
Size 19" Rack mount  

OCI Vacuum Microengineering