OCI Vacuum Microengineering

Electron Gun

G10 Series

        Features:

  • Miniature Lens Design
  • Variable Beam Diameter
  • Variable Beam Energy
  • Low Outgassing Rate
  • Flexible Mounting Configuration
 
Specifications

Model GN10
Beam Energy

Low Energy Mode (LEM): from 5 eV to 750 eV
High Energy Mode (HEM): to 3000 eV

Beam Current

LEM: 2 µA at 100 eV and 0.5 mm beam size
HEM : up to 80 µA at 3keV

Beam Size Adjusted by potential of Wehnelt cylinder from 1mm to 250 µm and limited by exchangeable aperture down to 5 µm
Electron Source Thermally emitting tungsten-rhenium filament, directly heated single crystal LaB6 filament optional
Energy Spread

0.45 eV for Tungsten filament, 0.25 eV for LaB6 filament

Beam Deflection X-Y, two pairs of independent electrostatic deflection plates - optional
Overall Sizes 10 mm lens diameter and 80 mm length
Mounting unmounted or mounted on 2 3/4" CF with Mu-metal shielding
Target Distances from 40 to 60 mm of the end of the gun
Filament Light below 0.01 lux protection against escaping the filament light ( back and side gun lenses)