OCI Vacuum Microengineering

Digital Ion Sputter Gun Controller

Model IPS3-D

FEATURES:

Sputter control programming

Front panel or computer control via USB

Digital precision in setting and stability

Rotary optical encoder control on front panel

Integration to LabView (TM) or TestPoint (TM)

Automatic protrction against overload, short circuit and arc

Timing software for automation to control sputtering process

 
Specifications

POWER SUPLLY- Model IPS3-D

 
 

Analog Outputs:

 
Beam Voltage

positive, 0 - 3200V

Filament Current 0-4 A
Focus Voltage

positive ,0-3200V; factor 0.3 - 0.85 of beam voltage

Grid Voltage 150V in reference to filament
Emission Current 0-99 mA range
Monitoring all above voltages
Display vacuum fluorescent display for filament current and beam energy, emission current, program functions
Manual Control manual control of all voltages and filament current via rotary optical encoder and selection buttons, manual programming available
On-Board Automation 10 adjustable operating programs and also outgassing, standby, filament forming, constant emission current, diagnostics programs
PC Control full control of all functions, PC software is required , command list for easy custom programming (LabView)
Protection

over-voltage, over-current and short circuit protection

Input Power

100/110V AC, 50/60 Hz or 220V/240V AC, 50 Hz
Mechanical

19" rack mount box with 3U (5.25", 133mm) in height and 17.5" (440mm)in depth, weight: 12 kg